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Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform
Publication:
Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform
Date
2016
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rochus, Veronique
;
Jansen, Roelof
;
Goyvaerts, Jeroen
;
Vandenboch, Guy
;
van de Voort, Bob
;
Neutens, Pieter
;
O'Callaghan, John
;
Tilmans, Harrie
;
Rottenberg, Xavier
Journal
Abstract
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1926
since deposited on 2021-10-23
Acq. date: 2025-10-27
Citations
Metrics
Views
1926
since deposited on 2021-10-23
Acq. date: 2025-10-27
Citations