Authors

Rochus, Veronique; Jansen, Roelof; Goyvaerts, Jeroen; Vandenboch, Guy; van de Voort, Bob; Neutens, Pieter; O'Callaghan, John; Tilmans, Harrie; Rottenberg, Xavier

Conference

17th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectr. and Microsyst. - EuroSimE

Title

Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform

Publication type

Proceedings paper

Embargo date

9999-12-31