Publication:

Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform

Date

2016

Proceedings Paper

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Files

33772.pdf 738 KB

Author(s)

Rochus, Veronique

;

;

Goyvaerts, Jeroen

;

Vandenboch, Guy

;

van de Voort, Bob

;

Neutens, Pieter

;

O'Callaghan, John

;

Tilmans, Harrie

;

Rottenberg, Xavier

Statistics

1927 since deposited on 2021-10-23

Acq. date: 2026-02-25