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Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform

dc.contributor.authorRochus, Veronique
dc.contributor.authorJansen, Roelof
dc.contributor.authorGoyvaerts, Jeroen
dc.contributor.authorVandenboch, Guy
dc.contributor.authorvan de Voort, Bob
dc.contributor.authorNeutens, Pieter
dc.contributor.authorO'Callaghan, John
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-23T14:16:12Z
dc.date.available2021-10-23T14:16:12Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27222
dc.sourceIIOimport
dc.titleDesign of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorGoyvaerts, Jeroen
dc.contributor.imecauthorvan de Voort, Bob
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference17th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectr. and Microsyst. - EuroSimE
dc.source.conferencedate18/04/2016
dc.source.conferencelocationMontpellier France
imec.availabilityPublished - open access


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