Impact of wafer thinning on ESD protection devices in 3D integrated systems

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Authors
Scholz, Mirko; Vaisman Chasin, Adrian; Linten, Dimitri; Van der Plas, Geert; Beyne, Eric
Conference
International ESD Workshop - IEW
Title
Impact of wafer thinning on ESD protection devices in 3D integrated systems
Publication type
Meeting abstract
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