Characterization of optical material properties for alternative EUV mask absorber materials

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Authors
Scholze, Frank; Laubis, Christian; Philipsen, Vicky; Luong, Vu; Edrisi, Arash; Van de Kruijs, Robbert
Conference
European Mask and Lithography Conference - EMLC
Title
Characterization of optical material properties for alternative EUV mask absorber materials
Publication type
Proceedings paper
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