Evaluation of optical material parameters for advanced absorbers on EUV masks

Publication:

2016

Presentation

Author(s)

Scholze, Frank

;

Laubis, Christian

;

;

;

Edrisi, Arash

;

van de Kruijs, Robbert

2058 since deposited on 2021-10-23

Acq. date: 2026-06-06