Double-sided processing for membrane-based photonic integration
dc.contributor.author | Shen, Longfei | |
dc.contributor.author | Jiao, Yuqing | |
dc.contributor.author | Higuera-Rodriguez, Aura | |
dc.contributor.author | Millan-Mejia, Alonso | |
dc.contributor.author | Roelkens, Gunther | |
dc.contributor.author | Smit, M. | |
dc.contributor.author | van de Tol, Jos | |
dc.date.accessioned | 2021-10-23T14:50:31Z | |
dc.date.available | 2021-10-23T14:50:31Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27301 | |
dc.source | IIOimport | |
dc.title | Double-sided processing for membrane-based photonic integration | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Roelkens, Gunther | |
dc.contributor.orcidimec | Roelkens, Gunther::0000-0002-4667-5092 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | ECIO/o-31 | |
dc.source.conference | 18th European Conference in Integrated Optics - ECIO | |
dc.source.conferencedate | 18/05/2016 | |
dc.source.conferencelocation | Warsaw Poland | |
imec.availability | Published - open access |