Highly activated phosphorus in CVD Ge layers using in-situ doping at low temperature enabled by high order Ge precursors: toward Group-IV optical interconnections

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Authors
Shimura, Yosuke; Srinivasan, Ashwyn; Van Thourhout, Dries; Van Deun, Rik; Pantouvaki, Marianna; Van Campenhout, Joris; Loo, Roger
Conference
9th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically
Title
Highly activated phosphorus in CVD Ge layers using in-situ doping at low temperature enabled by high order Ge precursors: toward Group-IV optical interconnections
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Meeting abstract
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