Publication:

Metal oxide EUV photoresist performance for N7 relevant patterns and processes

Date

2016

Proceedings Paper

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Files

34343.pdf 2.52 MB

Author(s)

;

Anderson, Jeremy

;

Cardineau, Brian

;

Clark, Benjamin

;

De Schepper, Peter

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;

;

;

Kocsis, Michael

;

Meyers, Stephen

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;

Grenville, Andrew

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De Simone, Danilo

;

Gillijns, Werner

;

Vandenberghe, Geert

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2000 since deposited on 2021-10-23

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Acq. date: 2026-10-10