The influence of solvents on the quality of SAMs for low-k pore sealing purpose

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Authors
Sun, Yiting; de Roover, Roel; Struyf, Herbert; De Feyter, Steven; Armini, Silvia
Conference
Materials for Advanced Metallization Conference - MAM
Title
The influence of solvents on the quality of SAMs for low-k pore sealing purpose
Publication type
Meeting abstract
Embargo date
9999-12-31
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