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The influence of solvents on the quality of SAMs for low-k pore sealing purpose

dc.contributor.authorSun, Yiting
dc.contributor.authorde Roover, Roel
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Feyter, Steven
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-23T15:21:02Z
dc.date.available2021-10-23T15:21:02Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27366
dc.sourceIIOimport
dc.titleThe influence of solvents on the quality of SAMs for low-k pore sealing purpose
dc.typeMeeting abstract
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage115
dc.source.endpage116
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access
imec.internalnotespaper PD-03


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