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CMP process steps for the fabrication of spin-transfer torque magnetic random access memory

dc.contributor.authorTsvetanova, Diana
dc.contributor.authorHeylen, Nancy
dc.contributor.authorTeugels, Lieve
dc.contributor.authorCrotti, Davide
dc.contributor.authorDonadio, Gabriele Luca
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorStruyf, Herbert
dc.contributor.authorSouriau, Laurent
dc.contributor.authorMertens, Sofie
dc.contributor.authorSwerts, Johan
dc.contributor.authorCouet, Sebastien
dc.contributor.authorLin, Tsann
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorKim, Woojin
dc.contributor.authorRao, Siddharth
dc.date.accessioned2021-10-23T15:41:12Z
dc.date.available2021-10-23T15:41:12Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27408
dc.sourceIIOimport
dc.titleCMP process steps for the fabrication of spin-transfer torque magnetic random access memory
dc.typeProceedings paper
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorCrotti, Davide
dc.contributor.imecauthorDonadio, Gabriele Luca
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorCouet, Sebastien
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorKim, Woojin
dc.contributor.imecauthorRao, Siddharth
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecCouet, Sebastien::0000-0001-6436-9593
dc.contributor.orcidimecRao, Siddharth::0000-0001-6161-3052
dc.source.peerreviewno
dc.source.conference20th International Symposium on CMP at CAMP
dc.source.conferencedate7/08/2016
dc.source.conferencelocationLake Placid, NY USA
dc.identifier.urlhttp://www.clarkson.edu/camp/cmp16/Agenda%20per%208-4-16.pdf
imec.availabilityPublished - imec


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