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Patterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etching
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Authors
Van Erps, Jurgen
;
Ciuk, Tymoteusz
;
Pasternak, Iwona
;
Krajewska, Aleksandra
;
Strupinski, Wlodek
;
Van Put, Steven
;
Van Steenberge, Geert
;
Baert, Kitty
;
Terryn, Herman
;
Thienpont, Hugo
;
Vermeulen, Nathalie
Conference
Silicon Photonics and Photonic Integrated Circuits V
Title
Patterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etching
Publication type
Proceedings paper
Embargo date
9999-12-31
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