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Patterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etching

dc.contributor.authorVan Erps, Jurgen
dc.contributor.authorCiuk, Tymoteusz
dc.contributor.authorPasternak, Iwona
dc.contributor.authorKrajewska, Aleksandra
dc.contributor.authorStrupinski, Wlodek
dc.contributor.authorVan Put, Steven
dc.contributor.authorVan Steenberge, Geert
dc.contributor.authorBaert, Kitty
dc.contributor.authorTerryn, Herman
dc.contributor.authorThienpont, Hugo
dc.contributor.authorVermeulen, Nathalie
dc.date.accessioned2021-10-23T16:04:42Z
dc.date.available2021-10-23T16:04:42Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27458
dc.sourceIIOimport
dc.titlePatterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etching
dc.typeProceedings paper
dc.contributor.imecauthorVan Put, Steven
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage98910T
dc.source.conferenceSilicon Photonics and Photonic Integrated Circuits V
dc.source.conferencedate3/04/2016
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2523711&resultClick=1
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9891


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