dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Debruyn, Haroen | |
dc.contributor.author | Xu, XiuMei | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-23T16:37:14Z | |
dc.date.available | 2021-10-23T16:37:14Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27523 | |
dc.source | IIOimport | |
dc.title | Influence of CO2 gas atmosphere on the liquid filling of superhydrophobic nanostructures | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Debruyn, Haroen | |
dc.contributor.imecauthor | Xu, XiuMei | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | Xu, XiuMei::0000-0002-3356-8693 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 141 | |
dc.source.endpage | 146 | |
dc.source.conference | Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS | |
dc.source.conferencedate | 11/09/2016 | |
dc.source.conferencelocation | Knokke Belgium | |
dc.identifier.url | https://www.scientific.net/SSP.255.141 | |
imec.availability | Published - imec | |
imec.internalnotes | Solid State Phenomena; Vol. 255 | |