Nanoscale evidence for the superior reliability of SiGe high-k pMOSFETs

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Authors
Waltl, Michael; Grill, Alexander; Rzepa, Gerhard; Goes, Wolfgang; Franco, Jacopo; Kaczer, Ben; Mitard, Jerome; Grasser, Tibor
Conference
International Reliability Physics Symposium - IRPS
Title
Nanoscale evidence for the superior reliability of SiGe high-k pMOSFETs
Publication type
Proceedings paper
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