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Ruthenium metallization for advanced interconnects

dc.contributor.authorWen, Liang Gong
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorDutta, Shibesh
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorBriggs, Basoene
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVanstreels, Kris
dc.contributor.authorWilson, Chris
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCroes, Kristof
dc.contributor.authorBommels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-23T17:08:46Z
dc.date.available2021-10-23T17:08:46Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27583
dc.sourceIIOimport
dc.titleRuthenium metallization for advanced interconnects
dc.typeProceedings paper
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewno
dc.source.beginpage34
dc.source.endpage36
dc.source.conferenceIEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
dc.source.conferencedate23/05/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7507651
imec.availabilityPublished - imec


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