Authors

Meynan, H.; Uttech, R.; Gao, Teng; Van Hove, Marleen; Maex, Karen

Conference

3rd International Symposium on Low and High Dielectric Constant Materials: Materials Science, Processing and Reliability Issues;

Title

The integration of low k hydrogen silsesquioxanes (HSQ) in sub 0.35µm processes

Publication type

Oral presentation