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Integration aspects of post-porosity low-k protection using PMMA sacrificial filler
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Authors
Zhang, Liping
;
de Marneffe, Jean-Francois
;
Wen, Liang Gong
;
Wilson, Chris
;
Tokei, Zsolt
;
Boemmels, Juergen
;
De Gendt, Stefan
;
Baklanov, Mikhaïl
Conference
Materials for Advanced Metallization - MAM
Title
Integration aspects of post-porosity low-k protection using PMMA sacrificial filler
Publication type
Meeting abstract
Embargo date
9999-12-31
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