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Ultra-compact silicon nitride grating coupler for microscopy system

dc.contributor.authorZhu, Yunpeng
dc.contributor.authorJiao, Y.
dc.contributor.authorWang, J.
dc.contributor.authorXie, Weiqiang
dc.contributor.authorBin, Tian
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-23T17:58:16Z
dc.date.available2021-10-23T17:58:16Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27676
dc.sourceIIOimport
dc.titleUltra-compact silicon nitride grating coupler for microscopy system
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage55
dc.source.endpage58
dc.source.conferenceProceedings of the 20th Annual Symposium of the IEEE Photonics Society Benelux Chapter
dc.source.conferencedate8/02/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access
imec.internalnotesISBN 978-2-8052-0288-9


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