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3D Localization of liner breakdown within Cu filled TSV?s by backside LIT and PEM defocusing series

dc.contributor.authorAltmann, Frank
dc.contributor.authorGrosse, Christian
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBrand, Sebastian
dc.date.accessioned2021-10-24T02:52:10Z
dc.date.available2021-10-24T02:52:10Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27744
dc.sourceIIOimport
dc.title3D Localization of liner breakdown within Cu filled TSV?s by backside LIT and PEM defocusing series
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage38
dc.source.endpage43
dc.source.conference43rd International Symposium for Testing and Failure Analysis - ISTFA
dc.source.conferencedate5/11/2017
dc.source.conferencelocationPasadena, CA USA
imec.availabilityPublished - imec


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