Show simple item record

First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices

dc.contributor.authorArreghini, Antonio
dc.contributor.authorDelhougne, Romain
dc.contributor.authorSubirats, Alexandre
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.date.accessioned2021-10-24T02:53:17Z
dc.date.available2021-10-24T02:53:17Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27767
dc.sourceIIOimport
dc.titleFirst demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices
dc.typeProceedings paper
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceInternational Memory Workshop
dc.source.conferencedate15/05/2017
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7939083/
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
35607.pdf
Size:
1.263Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record