Publication:

First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices

Date

2017

Proceedings Paper

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Files

35607.pdf 1.26 MB

Author(s)

Arreghini, Antonio

;

Delhougne, Romain

;

Subirats, Alexandre

;

Hikavyy, Andriy

;

Van den Bosch, Geert

;

Furnemont, Arnaud

Statistics

1869 since deposited on 2021-10-24

Acq. date: 2026-02-25