Publication:

First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices

Date

2017
Proceedings Paper
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dc.contributor.authorArreghini, Antonio
dc.contributor.authorDelhougne, Romain
dc.contributor.authorSubirats, Alexandre
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.accessioned2021-10-24T02:53:17Z
dc.date.available2021-10-24T02:53:17Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27767
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7939083/
dc.source.beginpage1
dc.source.conferenceInternational Memory Workshop
dc.source.conferencedate15/05/2017
dc.source.conferencelocationMonterey, CA USA
dc.source.endpage4
dc.title

First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices

dc.typeProceedings paper
dspace.entity.typePublication
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