Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices
Publication:
First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices
Date
2017
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
35607.pdf
1.26 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Arreghini, Antonio
;
Delhougne, Romain
;
Subirats, Alexandre
;
Hikavyy, Andriy
;
Van den Bosch, Geert
;
Furnemont, Arnaud
Journal
Abstract
Description
Metrics
Views
1864
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
1864
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations