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Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet

dc.contributor.authorBahrenberg, Lukas
dc.contributor.authorDanylyuk, Serhiy
dc.contributor.authorBrose, Sascha
dc.contributor.authorPollentier, Ivan
dc.contributor.authorTimmermans, Marina
dc.contributor.authorGallagher, Emily
dc.contributor.authorStollenwerk, Jochen
dc.contributor.authorLoosen, Peter
dc.date.accessioned2021-10-24T02:54:26Z
dc.date.available2021-10-24T02:54:26Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27787
dc.sourceIIOimport
dc.titleCharacterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet
dc.typeProceedings paper
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.identifier.doi10.1117/12.2280579
dc.source.peerreviewyes
dc.source.beginpage104501L
dc.source.conferenceInternational Conference on Extreme Ultraviolet Lithography
dc.source.conferencedate11/09/2017
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 10450


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