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PPAC scaling enablement for 5nm Mobile SoC technology

dc.contributor.authorBaradoglu, Mustafa
dc.contributor.authorXu, Jeff
dc.contributor.authorZhu, John
dc.contributor.authorYang, Da
dc.contributor.authorBao, Jerry
dc.contributor.authorSong, Seung-Chul
dc.contributor.authorFeng, Peijie
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMertens, Hans
dc.contributor.authorEneman, Geert
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorSmith, Jeffrey
dc.contributor.authorDatta, Suman
dc.contributor.authorKohen, David
dc.contributor.authorChan, Po-Wen
dc.contributor.authorChen, Keagan
dc.contributor.authorChidambaram, PR. Chidi
dc.date.accessioned2021-10-24T02:55:16Z
dc.date.available2021-10-24T02:55:16Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27799
dc.sourceIIOimport
dc.titlePPAC scaling enablement for 5nm Mobile SoC technology
dc.typeProceedings paper
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage240
dc.source.endpage243
dc.source.conference47th European Solid-State Devices Research Conference - ESSDERC
dc.source.conferencedate11/09/2017
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8066636/
imec.availabilityPublished - open access


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