Process optimization and variability improvement of contacts using grapho-epitaxy DSA

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Authors
Boeckx, Carolien; Doise, Jan; Chan, BT; De Gendt, Stefan; Rincon Delgadillo, Paulina
Conference
3rd DSA Symposium
Title
Process optimization and variability improvement of contacts using grapho-epitaxy DSA
Publication type
Proceedings paper
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