Authors

Bogdanowicz, Janusz; Folkersma, Steven; Schulze, Andreas; Moussa, Alain; Merckling, Clement; Kunert, Bernardette; Guo, Weiming; Petersen, Dirch; Witthoft, Maria-Louise; Hansen, Ole; Henrichsen, Henrik; Nielsen, Peter; Vandervorst, Wilfried

Conference

International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN

Title

In-line sheet resistance measurements of nanometer-wide semiconducting fins

Publication type

Proceedings paper