Publication:

In-line sheet resistance measurements of nanometer-wide semiconducting fins

Date

2017

Proceedings Paper

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Author(s)

Bogdanowicz, Janusz

;

Folkersma, Steven

;

Schulze, Andreas

;

;

Merckling, Clement

;

Kunert, Bernardette

;

;

Petersen, Dirch

;

Witthoft, Maria-Louise

;

;

Henrichsen, Henrik

;

;

Vandervorst, Wilfried

Metrics

1898 since deposited on 2021-10-24

Acq. date: 2026-01-07