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In-line sheet resistance measurements of nanometer-wide semiconducting fins
Publication:
In-line sheet resistance measurements of nanometer-wide semiconducting fins
Date
2017
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Folkersma, Steven
;
Schulze, Andreas
;
Moussa, Alain
;
Merckling, Clement
;
Kunert, Bernardette
;
Guo, Weiming
;
Petersen, Dirch
;
Witthoft, Maria-Louise
;
Hansen, Ole
;
Henrichsen, Henrik
;
Nielsen, Peter
;
Vandervorst, Wilfried
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1893
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
1893
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations