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Sheet-resistance measurements in nanometer-wide conductive lines

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorFolkersma, Steven
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorSchulze, Andreas
dc.contributor.authorParedis, Kristof
dc.contributor.authorCelano, Umberto
dc.contributor.authorKunert, Bernardette
dc.contributor.authorGuo, Weiming
dc.contributor.authorMols, Yves
dc.contributor.authorPetersen, Dirch
dc.contributor.authorWitthoft, Maria-Louise
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik
dc.contributor.authorNielsen, Pieter
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T03:02:59Z
dc.date.available2021-10-24T03:02:59Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27876
dc.sourceIIOimport
dc.titleSheet-resistance measurements in nanometer-wide conductive lines
dc.typeMeeting abstract
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorMols, Yves
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.source.peerreviewno
dc.source.beginpageS 6.4
dc.source.conferenceEMRS Spring Meeting Symposium S: Analytical Techniques for Precise Characterization of Nano Materials - ALTECH
dc.source.conferencedate22/05/2017
dc.source.conferencelocationStrasbourg France
dc.identifier.urlhttps://www.european-mrs.com/sites/default/files/pdf/conference_program.pdf
imec.availabilityPublished - imec


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