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Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

dc.contributor.authorChanson, Romain
dc.contributor.authorLefaucheux, P.L.
dc.contributor.authorDussart, R.
dc.contributor.authorTillocher, T.
dc.contributor.authorShen, P.
dc.contributor.authorUrabe, K.
dc.contributor.authorDussarat, C.
dc.contributor.authorMaekawa, K.
dc.contributor.authorYatsuda, K.
dc.contributor.authorTahara, S.
dc.contributor.authorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-24T03:23:12Z
dc.date.available2021-10-24T03:23:12Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28002
dc.sourceIIOimport
dc.titleLow-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.source.peerreviewyes
dc.source.beginpageEM-ThP5
dc.source.conferenceAVS 64th International Symposium & Exhibition
dc.source.conferencedate28/10/2017
dc.source.conferencelocationTampa, FL USA
dc.identifier.urlhttp://www2.avs.org/symposium2017/Papers/Paper_EM-ThP5.html
imec.availabilityPublished - imec


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