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Combined in-situ scanning force microscopy/TOFSIMS and FIB-TOFSIMS analysis: towards 3D chemical analysis

dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorOp de Beeck, Jonathan
dc.contributor.authorCelano, Umberto
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMoeler, Rudolf
dc.contributor.authorLabyedh, Nouha
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-24T03:33:29Z
dc.date.available2021-10-24T03:33:29Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28054
dc.sourceIIOimport
dc.titleCombined in-situ scanning force microscopy/TOFSIMS and FIB-TOFSIMS analysis: towards 3D chemical analysis
dc.typeMeeting abstract
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorOp de Beeck, Jonathan
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLabyedh, Nouha
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecOp de Beeck, Jonathan::0000-0003-3471-2156
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecLabyedh, Nouha::0000-0002-1036-0988
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.conference79th IUVSTA Workshop: 3D Chemical Imaging - From Fundamentals to Advancing Applications
dc.source.conferencedate15/05/2017
dc.source.conferencelocationPula Italy
imec.availabilityPublished - imec


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