Authors

Conard, Thierry; Franquet, Alexis; Spampinato, Valentina; Op de Beeck, Jonathan; Celano, Umberto; Vandervorst, Wilfried; Moeler, Rudolf; Labyedh, Nouha; Vereecken, Philippe

Conference

79th IUVSTA Workshop: 3D Chemical Imaging - From Fundamentals to Advancing Applications

Title

Combined in-situ scanning force microscopy/TOFSIMS and FIB-TOFSIMS analysis: towards 3D chemical analysis

Publication type

Meeting abstract