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Combined in-situ scanning force microscopy/TOFSIMS and FIB-TOFSIMS analysis: towards 3D chemical analysis

Date

2017
Meeting abstract
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dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorOp de Beeck, Jonathan
dc.contributor.authorCelano, Umberto
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMoeler, Rudolf
dc.contributor.authorLabyedh, Nouha
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorOp de Beeck, Jonathan
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLabyedh, Nouha
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecOp de Beeck, Jonathan::0000-0003-3471-2156
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecLabyedh, Nouha::0000-0002-1036-0988
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-24T03:33:29Z
dc.date.available2021-10-24T03:33:29Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28054
dc.source.conference79th IUVSTA Workshop: 3D Chemical Imaging - From Fundamentals to Advancing Applications
dc.source.conferencedate15/05/2017
dc.source.conferencelocationPula Italy
dc.title

Combined in-situ scanning force microscopy/TOFSIMS and FIB-TOFSIMS analysis: towards 3D chemical analysis

dc.typeMeeting abstract
dspace.entity.typePublication
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