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Influence of wafer-to-wafer bond alignment on via-last patterning for 3DSOC applications
Publication:
Influence of wafer-to-wafer bond alignment on via-last patterning for 3DSOC applications
Date
2017
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Vos, Joeri
;
Peng, Lan
;
Van Ongeval, Joost
;
Phommahaxay, Alain
;
Miller, Andy
;
Beyne, Eric
;
Kurz, Florian
;
Wagenleiter, Thomas
;
Wimplinger, Markus
;
Uhrmann, Thomas
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Abstract
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1832
since deposited on 2021-10-24
Acq. date: 2025-10-26
Citations
Metrics
Views
1832
since deposited on 2021-10-24
Acq. date: 2025-10-26
Citations