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Low track height standard-cells enable high-placement density and low-BEOL cost
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Authors
Debacker, Peter
;
Mattii, Luca
;
Sherazi, Yasser
;
Baert, Rogier
;
Gerousis, Vassilios
;
Nauts, Claire
;
Raghavan, Praveen
;
Ryckaert, Julien
;
Kim, Ryan Ryoung han
;
Verkest, Diederik
Conference
Design-Process-Technology Co-optimization for Manufacturability XI
Title
Low track height standard-cells enable high-placement density and low-BEOL cost
Publication type
Proceedings paper
Embargo date
9999-12-31
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