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Low track height standard-cells enable high-placement density and low-BEOL cost

dc.contributor.authorDebacker, Peter
dc.contributor.authorMattii, Luca
dc.contributor.authorSherazi, Yasser
dc.contributor.authorBaert, Rogier
dc.contributor.authorGerousis, Vassilios
dc.contributor.authorNauts, Claire
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorRyckaert, Julien
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorVerkest, Diederik
dc.date.accessioned2021-10-24T04:02:56Z
dc.date.available2021-10-24T04:02:56Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28186
dc.sourceIIOimport
dc.titleLow track height standard-cells enable high-placement density and low-BEOL cost
dc.typeProceedings paper
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1014803
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XI
dc.source.conferencedate26/02/2017
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2626124
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10148


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