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CMOS integration of thermally stable diffusion and gate replacement (D&GR) high-k/metal gate stacks in DRAM periphery transistors

dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorSpessot, Alessio
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorJi, Yunhyuck
dc.contributor.authorMannaert, Geert
dc.contributor.authorLorant, Christophe
dc.contributor.authorSebaai, Farid
dc.contributor.authorThiam, Arame
dc.contributor.authorErcken, Monique
dc.contributor.authorDemuynck, Steven
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-24T04:10:53Z
dc.date.available2021-10-24T04:10:53Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28218
dc.sourceIIOimport
dc.titleCMOS integration of thermally stable diffusion and gate replacement (D&GR) high-k/metal gate stacks in DRAM periphery transistors
dc.typeProceedings paper
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage533
dc.source.endpage534
dc.source.conference49th International Conferece on Solid State Devices and Materials - SSDM
dc.source.conferencedate19/09/2017
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - open access


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