Authors

Doise, Jan; Chan, BT; Hori, Masafumi; Gronheid, Roel

DOI

10.1117/12.2259791

Conference

Advances in Patterning Materials and Processes XXXIV

Title

Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

Publication type

Proceedings paper

Embargo date

9999-12-31