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Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process

dc.contributor.authorDutta, Shibesh
dc.contributor.authorKundu, Shreya
dc.contributor.authorWen, Lianggong
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorCroes, Kristof
dc.contributor.authorGupta, Anshul
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-24T04:31:17Z
dc.date.available2021-10-24T04:31:17Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28292
dc.sourceIIOimport
dc.titleRuthenium interconnects with 58 nm2 cross-section area using a metal-spacer process
dc.typeProceedings paper
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage3
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate16/05/2017
dc.source.conferencelocationHsinchu Taiwan
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7968937/
imec.availabilityPublished - open access


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