Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process

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Authors
Dutta, Shibesh; Kundu, Shreya; Wen, Lianggong; Jamieson, Geraldine; Croes, Kristof; Gupta, Anshul; Boemmels, Juergen; Wilson, Chris; Adelmann, Christoph; Tokei, Zsolt
Conference
IEEE International Interconnect Technology Conference - IITC
Title
Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process
Publication type
Proceedings paper
Embargo date
9999-12-31
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