Publication:
Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1988 since deposited on 2021-10-24
434item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1988 since deposited on 2021-10-24
434item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations