Publication:

Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process

Date

2017
Proceedings Paper
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dc.contributor.authorDutta, Shibesh
dc.contributor.authorKundu, Shreya
dc.contributor.authorWen, Lianggong
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorCroes, Kristof
dc.contributor.authorGupta, Anshul
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2021-10-24T04:31:17Z
dc.date.available2021-10-24T04:31:17Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28292
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7968937/
dc.source.beginpage1
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate16/05/2017
dc.source.conferencelocationHsinchu Taiwan
dc.source.endpage3
dc.title

Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process

dc.typeProceedings paper
dspace.entity.typePublication
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