Publication:
Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process
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1991 since deposited on 2021-10-24
1last month
Acq. date: 2026-02-28
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Statistics
Views
1991 since deposited on 2021-10-24
1last month
Acq. date: 2026-02-28
Citations