Authors

Everaert, Jean-Luc; Schaekers, Marc; Yu, Hao; Wang, Linlin; Hikavyy, Andriy; Date, Lucien; del Agua Borniquel, Jose Ignacio; Hollar, Kelly; Khaja, Fareen; Aderhold, Wolfgang; Mayur, Abhilash; Lee, JaeYoung; van Meer, Hans; Jiang, Yu-Long; De Meyer, Kristin; Mocuta, Dan; Horiguchi, Naoto

Conference

Symposium on VLSI Technology

Title

Sub-10-9 Ohm.cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation

Publication type

Proceedings paper

Embargo date

9999-12-31