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Effect of remote oxygen scavenging on electrical properties of Ge-based metal-oxide-semiconductor capacitors
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Authors
Fadida, Sivan
;
Nyns, Laura
;
Van Elshocht, Sven
;
Eizenberg, Moshe
ISSN
0361-5235
Issue
1
Journal
Journal of Electronic Materials
Volume
46
Title
Effect of remote oxygen scavenging on electrical properties of Ge-based metal-oxide-semiconductor capacitors
Publication type
Journal article
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