Show simple item record

From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration

dc.contributor.authorFlorent, Karine
dc.contributor.authorLavizzari, Simone
dc.contributor.authorDi Piazza, Luca
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorPotoms, Goedele
dc.contributor.authorRaymaekers, Tom
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-24T04:45:55Z
dc.date.available2021-10-24T04:45:55Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28341
dc.sourceIIOimport
dc.titleFrom planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration
dc.typeProceedings paper
dc.contributor.imecauthorDi Piazza, Luca
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorPotoms, Goedele
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage164
dc.source.endpage167
dc.source.conference47th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/2017
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8066617/
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
35926.pdf
Size:
1.353Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record