Publication:

From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration

Date

2017

Proceedings Paper

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Files

35926.pdf 1.35 MB

Author(s)

Florent, Karine

;

Lavizzari, Simone

;

Di Piazza, Luca

;

Popovici, Mihaela Ioana

;

Potoms, Goedele

;

Raymaekers, Tom

;

Groeseneken, Guido

;

Statistics

2004 since deposited on 2021-10-24

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Acq. date: 2026-02-26