Publication:
From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2007 since deposited on 2021-10-24
2last month
1last week
Acq. date: 2026-04-16
Citations
Statistics
Views
2007 since deposited on 2021-10-24
2last month
1last week
Acq. date: 2026-04-16
Citations