Publication:

From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration

Date

2017
Proceedings Paper
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dc.contributor.authorFlorent, Karine
dc.contributor.authorLavizzari, Simone
dc.contributor.authorDi Piazza, Luca
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorPotoms, Goedele
dc.contributor.authorRaymaekers, Tom
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorDi Piazza, Luca
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorPotoms, Goedele
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-24T04:45:55Z
dc.date.available2021-10-24T04:45:55Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28341
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8066617/
dc.source.beginpage164
dc.source.conference47th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/2017
dc.source.conferencelocationLeuven Belgium
dc.source.endpage167
dc.title

From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration

dc.typeProceedings paper
dspace.entity.typePublication
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