Publication:
From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration
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2018 since deposited on 2021-10-24
6last month
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Acq. date: 2026-08-06
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Statistics
Views
2018 since deposited on 2021-10-24
6last month
2last week
Acq. date: 2026-08-06
Citations