Understanding ferroelectric Al:HfO2 thin films with Si-based electrodes for 3D applications

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Authors

Florent, Karine; Lavizzari, Simone; Popovici, Mihaela Ioana; Di Piazza, Luca; Celano, Umberto; Groeseneken, Guido; Van Houdt, Jan

ISSN

0021-8979

Issue

20

Journal

Journal of Applied Physics

Volume

121

Title

Understanding ferroelectric Al:HfO2 thin films with Si-based electrodes for 3D applications

Publication type

Journal article

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