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Characterization of oxide defects in InGaAs MOS gate stacks for high-mobility n-channel MOSFETs
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Authors
Franco, Jacopo
;
Putcha, Vamsi
;
Vais, Abhitosh
;
Sioncke, Sonja
;
Waldron, Niamh
;
Zhou, Daisy
;
Rzepa, Gerhard
;
Roussel, Philippe
;
Groeseneken, Guido
;
Heyns, Marc
;
Collaert, Nadine
;
Linten, Dimitri
;
Grasser, Tibor
;
Kaczer, Ben
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Characterization of oxide defects in InGaAs MOS gate stacks for high-mobility n-channel MOSFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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